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1:37
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JAISTClips
JAIST共通実験機器:マスクレス露光機(Heidelberg Instruments製 MLA150)
マスクレス露光装置は、デバイス作製に必要不可欠な、フォトレジストパターンを得るための装置です。北陸先端科学技術大学院大学・マテリアルサイエンス ウェブサイト (https://www.jaist.ac.jp/ms/)
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